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NT・・・H Features

IKO Nano Linear NT・・・H is a direct-drive moving-magnet type positioning table, which has magnets and an optical linear scale incorporated into a moving table made of steel, and stator coils and linear scale head incorporated in a steel bed. For guiding parts of the table, an IKO Crossed Roller Way is used in combination with a linear motor and a high-resolution linear encoder to facilitate highly accurate positioning.
Furthermore, except for the linear motion rolling guides, mechanical contact is completely eliminated by adopting the unique design of a wireless moving table in which the linear scale sensor is arranged on the bed. Therefore, the table generates very little dust and provides a high level of cleanliness.
IKO Nano Linear NT・・・H is most suitable for use as a compact positioning mechanism for semiconductor and liquid crystal related equipment and measuring instrument and assembly systems where cleanliness is essential.

Linear Motor Drive

Ball Screw Drive

Worm Gear Drive Type

Timing Belt Drive Type