Nano Linear NT・・・H

IKO Nano Linear NT・・・H is a direct-drive moving-magnet type positioning table, which has magnets and an optical linear scale incorporated into a moving table made of steel, and stator coils and linear scale head incorporated in a steel bed.
For guiding parts of the table, an IKO Crossed Roller Way is used in combination with a linear motor and a high-resolution linear encoder to facilitate highly accurate positioning.
Furthermore, except for the linear motion rolling guides, mechanical contact is completely eliminated by adopting the unique design of a wireless moving table in which the linear scale sensor is arranged on the bed. Therefore, the table generates very little dust and provides a high level of cleanliness.
IKO Nano Linear NT・・・H is most suitable for use as a compact positioning mechanism for semiconductor and liquid crystal related equipment and measuring instrument and assembly systems where cleanliness is essential.

Product Features

Nano Linear NT・・・H Detailed description
Excellent positioning repeatability
This type makes used of an IKO Anti-Creep Cage Crossed Roller Way Unit with built-in rack and pinion as the linear motion rolling guide. This results in high rigidity and smooth motion, comparable to a static air bearing. This type has excellent positioning repeatability since its attitude is rarely affected by the movement of the table.
Positioning accuracy and straightness of 1 μm or less
Positioning accuracy and straightness of 1 μm or less are achieved due to studying accuracies of all components and assembling the components precisely.
High speed stability
This type has increased its speed stability by the combination of an IKO Crossed Roller Way capable of extremely smooth motion, a linear motor of the coreless moving magnet type, and a high performance servo driver. (+/-1% or less in 10mm/s)

Basic specifications of Nano Linear NT88H

Model High accuracy type NT…H
NT88H25 NT88H65
Model and size

Sectional shape

Maximum thrust N 25
Rated thrust N
5 5
Maximum load mass kg 5 5
Effective stroke length mm
25 65
Resolution μm 0.01 0.05 0.01 0.05
Maximum speed mm/s
90 400 90 400
Positioning repeatability μm ±0.1 ±0.1

Some products are not shown in the catalogue. Also, modifications can be made to meet your requirements. Please do not hesitate to make inquiries.

Pick Up

Linear Motor Drive

Ball Screw Drive

Worm Gear Drive Type

Timing Belt Drive Type