Specification

The performance of SA-DE is shown in the table below.

Specifications and Performance

Item Identification number
SA65DE/1X SA65DE/5X SA120DE/1X SA120DE/5X SA200DE/1X SA200DE/5X
Maximum thrust(1 N 25 70 400(250)(8)
Rated thrust(2 N 3.5 15(7 70
Effective stroke length mm 10 20 20
Maximum load mass Kg 2.4 5.9 30.0(20.0)(8)
Resolution μm 0.1 0.5 0.1 0.5 0.1 0.5
Maximum speed(3)(4) mm/s 270 500 270 800 270 800
Positioning repeatability(5) μm ±0.5
Mass of moving table Kg 0.17 1.2 3.4
Total mass(6) Kg 0.35 2.5 7.2
Ambient temperature and
humidity in operation
0~40°C・20~80% RH(keep dewdrop free)
Notes(1) The duration of maximum thrust is up to 1 second.
    (2) This is based on the case of mounting on a metal mating member material at an ambient temperature of 20℃.
    (3) For the case of exceeding the displayed speed, please contact IKO.
    (4) This maximum speed may not be reached depending on the maximum output frequency of the controller used, and the driver type or settings.
    (5) When the temperature of the product is constant.
    (6) Mass of the cord is not included.
    (7) The rated thrust applies within the effective stroke range.
    (8) Numbers in parentheses indicate values when used with an ADVA-R5ML driver.

Specifications and Performance

Item Identification number
SA65DE/S SA120DE/S SA200DE/S
Maximum torque(1 N・m 0.5 2.0 8.0(6.0)(7)
Rated torque(2 N・m 0.06 0.4 2.0
Maximum load mass Kg 2.2 6.8 21.2(17.1)(7)
Effective operating angle degree 50 60 280
Resolution sec 0.64 0.36 0.25
pulse/degree 5625 10000 14400
Maximum speed(3)(4) degree/sec 720 400 270
Positioning repeatability(5) sec ±1.3 ±0.8 ±0.5
Inertia moment of moving table kg・m2 0.00012 0.002 0.013
Total mass(6) kg 0.5 2 6.0
Ambient temperature and
humidity in operation
0~40°C・20~80%RH(keep dewdrop free)
Notes(1) The duration of maximum torque is up to 1 second.
    (2) This is based on the case of mounting on a metal mating member material at an ambient temperature of 20℃.
    (3) For the case of exceeding the displayed speed, please contact IKO.
    (4) This maximum speed may not be reached depending on the maximum output frequency of the controller used, and the driver type or settings.
    (5) When the temperature of the product is constant.
    (6) Mass of the cord is not included.
    (7) Numbers in parentheses indicate values when used with an ADVA-R5ML driver.

Some products are not shown in the catalogue. Also, modifications can be made to meet your requirements. Please do not hesitate to make inquiries.

SA Features

IKO Alignment Stage SA uses IKO C-Lube Linear Way L in the linear motion rolling guide portion, IKO Crossed Roller Bearing in the revolving guiding portion, and adopts direct-drive system in the driving portion. It is an alignment stage that realizes low cross section, compact, XYθ movement. By the combination of high resolution linear scale and full closed loop control, Alignment Stage SA・・・D realizes high-accuracy positioning operation without any backlash.
It is most suitable for alignment processing utilizing image processing such as semiconductor and liquid crystal related manufacturing equipment, and positioning mechanism for measuring equipment and inspection instruments that require clean environments.

Linear Motor Drive

Ball Screw Drive

Worm Gear Drive Type

Timing Belt Drive Type