Dimension

The dimensions of SA120DE are shown below.

SA120DE/X

SA120DE/S

SA120DE/XY

SA120DE/XS

SA120DE/XYS

Some products are not shown in the catalogue. Also, modifications can be made to meet your requirements. Please do not hesitate to make inquiries.

SA Features

IKO Alignment Stage SA uses IKO C-Lube Linear Way L in the linear motion rolling guide portion, IKO Crossed Roller Bearing in the revolving guiding portion, and adopts direct-drive system in the driving portion. It is an alignment stage that realizes low cross section, compact, XYθ movement. By the combination of high resolution linear scale and full closed loop control, Alignment Stage SA・・・D realizes high-accuracy positioning operation without any backlash.
It is most suitable for alignment processing utilizing image processing such as semiconductor and liquid crystal related manufacturing equipment, and positioning mechanism for measuring equipment and inspection instruments that require clean environments.

Linear Motor Drive

Ball Screw Drive

Worm Gear Drive Type

Timing Belt Drive Type