System coifiguration configuration

ADVA and MR-J4 are available as dedicated drivers for the alignment stage SA. The system configuration differs depending on the driver used.
SA120DE is configured as shown below.

System configuration for SA120DE with driver ADVA

*Click the image to enlarge it.

No. Name Identification Number
Encoder extension cord
(2m)(1)
TAE20V4-EC02
PC connection cable USB mini B cable
This must be prepared by customer.
Setup software ProDriveNext
Please download from the official website of
Hitachi Industrial Equipment Systems Co., Ltd.
I/O connector TAE20R5-CN(2)
Power cord This must be prepared by customer.
Higher-level device
I/O connector connection cable
Notes(1) For specific cord length, please contact IKO.
    (2) I/O connector TAE20R5-CN is a combined product of 10150-3000PE (connector) and 10350-52F0-008 (cover) from 3M Japan Limited.

System configuration for SA120DE with driver ADVA...EC

*Click the image to enlarge it.

No. Name Identification Number
Encoder extension cord
(2m)(1)
TAE20V4-EC02
PC connection cable USB mini B cable
This must be prepared by customer.
Setup software ProDriveNext
Please download from the official website of
Hitachi Industrial Equipment Systems Co., Ltd.
I/O connector TAE20V5-CN(2)
Ethernet cable This must be prepared by customer.
Power cord
Higher-level device
I/O connector connection cable
Notes(1) For specific cord length, please contact IKO.
    (2) I/O connector TAE20V5-CN is a combined product of 10120-3000PE (connector) and 10320-52F0-008 (cover) from 3M Japan Limited.

System configuration (SSCNET Ⅲ/H supported) for SA120DE with driver MR-J4-10B

*Click the image to enlarge it.

No. Name Identification Number
Encoder extension cord
(2m)(1)
TAE20V6-EC02
PC connection cable(3m) MR-J3USBCBL3M
Setup software SW1DNC-MRC2-J
Connectors for input/output connection MR-CCN1(2)
Power cord This must be prepared by customer.
Higher-level device(3)
Connection cable for SSCNET Ⅲ/H
Notes(1) For specific cord length, please contact IKO.
    (2) Connector for input/output connection MR-CCN1 is a combined product of 10120-3000PE (connector) and 10320-52F0-008 (cover) from 3M Japan Limited.
    (3) The higher-level devices are a motion controller, positioning unit and DC24V power supply ready for SSCNET Ⅲ/H from Mitsubishi Electric Corporation.

Some products are not shown in the catalogue. Also, modifications can be made to meet your requirements. Please do not hesitate to make inquiries.

SA Features

IKO Alignment Stage SA uses IKO C-Lube Linear Way L in the linear motion rolling guide portion, IKO Crossed Roller Bearing in the revolving guiding portion, and adopts direct-drive system in the driving portion. It is an alignment stage that realizes low cross section, compact, XYθ movement. By the combination of high resolution linear scale and full closed loop control, Alignment Stage SA・・・D realizes high-accuracy positioning operation without any backlash.
It is most suitable for alignment processing utilizing image processing such as semiconductor and liquid crystal related manufacturing equipment, and positioning mechanism for measuring equipment and inspection instruments that require clean environments.

Linear Motor Drive

Ball Screw Drive

Worm Gear Drive Type

Timing Belt Drive Type